STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF PLATINUM-SILICIDE-SILICON CONTACTS AS INFLUENCED BY SPUTTER ETCHING AND ANNEALING AMBIENT

被引：11

作者：

SEVERI, M ^{[1
]}

GABILLI, E ^{[1
]}

GUERRI, S ^{[1
]}

CELOTTI, G ^{[1
]}

机构：

[1] CNR, LAMEL LAB, I-40126 BOLOGNA, ITALY

来源：

JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 05期

关键词：

D O I：

10.1063/1.323908

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1998 / 2003

页数：6

共 19 条

[1] ELECTRICAL CHARACTERISTICS AND THERMAL-STABILITY OF PLATINUM SILICIDE TO SILICON OHMIC CONTACTS METALIZED WITH TUNGSTEN
SINHA, AK
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (03) : C90 - &
[2] ELECTRICAL AND STRUCTURAL CHARACTERIZATION OF CO AND NI SILICIDE CONTACTS TO SILICON
KULKARNI, AK
CANALE, AJ
APPLIED SURFACE SCIENCE, 1991, 48-9 : 307 - 311
[3] ELECTRICAL CHARACTERISTICS AND THERMAL-STABILITY OF PLATINUM SILICIDE-TO-SILICON OHMIC CONTACTS METALIZED WITH TUNGSTEN
SINHA, AK
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (12) : 1767 - 1771
[4] On the γ-irradiation effect on platinum silicide-silicon contacts electrophysical characteristics
Il'chenko, V.V.
Lisnyak, P.G.
Strikha, V.I.
Kholodar', G.A.
Mikroelektronika, 1995, 24 (01): : 48 - 51
[5] Structural and electrical characterisation of titanium and nickel silicide contacts on silicon carbide
La Via, F
Roccaforte, F
Makhtari, A
Raineri, V
Musumeci, P
Calcagno, L
MICROELECTRONIC ENGINEERING, 2002, 60 (1-2) : 269 - 282
[6] METALLURGICAL PROPERTIES AND ELECTRICAL CHARACTERISTICS OF PALLADIUM SILICIDE-SILICON CONTACTS
KIRCHER, CJ
SOLID-STATE ELECTRONICS, 1971, 14 (06) : 507 - +
[7] Peculiarities of the electrophysical characteristics of platinum silicide-silicon contacts under impulsive overloads
1600, (31):
[8] GROWTH AND ELECTRICAL CHARACTERISTICS OF PALLADIUM SILICIDE CONTACTS ON DRY-ETCHED SILICON SURFACES
CLIMENT, A
FONASH, SJ
JOURNAL OF APPLIED PHYSICS, 1984, 56 (04) : 1063 - 1069
[9] SPUTTER-ETCHING AND PLASMA EFFECTS ON THE ELECTRICAL-PROPERTIES OF TITANIUM NITRIDE CONTACTS ON N-TYPE SILICON
ANG, SS
LE, HM
BROWN, WD
SOLID-STATE ELECTRONICS, 1990, 33 (11) : 1387 - 1391
[10] EFFECT OF ANNEALING ON ELECTRICAL CHARACTERISTICS OF PLATINUM BASED SCHOTTKY CONTACTS TO N-GaN LAYERS
Macherzynski, Wojciech
Paszkiewicz, Bogdan
Szyszka, Adam
Paszkiewicz, Regina
Tlaczala, Marek
JOURNAL OF ELECTRICAL ENGINEERING-ELEKTROTECHNICKY CASOPIS, 2009, 60 (05): : 276 - 278

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