THINNING OF A SILICON-SILICON OXIDE WAFER FOR TRANSMISSION ELECTRON-MICROSCOPY

被引：1
|
作者：
BAYLES, RA [1 ]
JESSER, WA [1 ]
机构：
[1] UNIV VIRGINIA,SCH ENGN & APPL SCI,DEPT MAT SCI,CHARLOTTESVILLE,VA 22901
来源：
MICRON | 1977年 / 8卷 / 1-2期
关键词：
D O I：
10.1016/0047-7206(77)90007-3
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
引用
收藏
页码：37 / 40
页数：4
相关论文
共 50 条
  • [21] CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY FOR POLYCRYSTALLINE SILICON FILMS
    OPPOLZER, H
    FALCKENBERG, R
    DOERING, E
    JOURNAL OF MICROSCOPY-OXFORD, 1980, 118 (JAN): : 97 - 103
  • [22] TRANSMISSION ELECTRON-MICROSCOPY OF REACTION-BONDED SILICON-NITRIDE
    DANFORTH, SC
    RICHMAN, MH
    METALLOGRAPHY, 1976, 9 (04): : 321 - 332
  • [23] SIMPLE TECHNIQUE FOR PREPARATION OF SILICON THIN FOILS FOR TRANSMISSION ELECTRON-MICROSCOPY
    WEST, AW
    RICHARDS, BP
    MICRON, 1975, 6 (3-4) : 121 - 122
  • [24] PREPARATION OF CROSS-SECTIONS OF SILICON SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY
    GARULLI, A
    ARMIGLIATO, A
    VANZI, M
    JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1985, 10 (02): : 135 - &
  • [25] TRANSMISSION ELECTRON-MICROSCOPY OF INTERGRANULAR REGIONS OF CORRODED SILICON-NITRIDE
    STALIOS, AD
    LUYTEN, J
    RILEY, FL
    FORDHAM, RJ
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 1995, 15 (06) : 573 - 579
  • [26] TECHNIQUE FOR SELECTED AREA OBSERVATIONS IN SILICON WAFERS BY TRANSMISSION ELECTRON-MICROSCOPY
    SZILVA, WA
    MURR, LE
    SATTLER, ML
    JOURNAL OF MATERIALS SCIENCE, 1974, 9 (05) : 859 - 861
  • [27] EARLY GROWTH OF SILICON ON SAPPHIRE .1. TRANSMISSION ELECTRON-MICROSCOPY
    ABRAHAMS, MS
    BUIOCCHI, CJ
    SMITH, RT
    CULLEN, GW
    CORBOY, JF
    BLANC, J
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (08) : C255 - C255
  • [28] PREPARATION OF TRANSVERSE SECTIONS OF SILICON-WAFERS FOR TRANSMISSION ELECTRON-MICROSCOPY
    MALININ, AA
    REZNIK, VY
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1988, 31 (05) : 1238 - 1240
  • [29] HYDROGEN-INDUCED PLATELETS IN SILICON STUDIED BY TRANSMISSION ELECTRON-MICROSCOPY
    MUTO, S
    TAKEDA, S
    HIRATA, M
    PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1995, 72 (04): : 1057 - 1074
  • [30] THINNING OF ALUMINUM POWDER PARTICLES FOR TRANSMISSION ELECTRON-MICROSCOPY
    KIRCHOFF, SD
    ADKINS, JY
    METALLOGRAPHY, 1987, 20 (01): : 75 - 87
12345