THINNING OF A SILICON-SILICON OXIDE WAFER FOR TRANSMISSION ELECTRON-MICROSCOPY

被引：1

作者：

BAYLES, RA ^{[1
]}

JESSER, WA ^{[1
]}

机构：

[1] UNIV VIRGINIA,SCH ENGN & APPL SCI,DEPT MAT SCI,CHARLOTTESVILLE,VA 22901

来源：

MICRON | 1977年 / 8卷 / 1-2期

关键词：

D O I：

10.1016/0047-7206(77)90007-3

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：37 / 40

页数：4

共 50 条

[1] CHARACTERIZATION OF SEMICONDUCTOR SILICON BY TRANSMISSION ELECTRON-MICROSCOPY
TAN, TY
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1984, 452 : 170 - 176
[2] THINNING METHOD FOR ELECTRON-MICROSCOPY TRANSPARENT SILICON AND GERMANIUM FOILS
STASZEWSKI, GMV
MICRON, 1978, 9 (04) : 207 - 209
[3] EBIC SCANNING ELECTRON-MICROSCOPY AND TRANSMISSION ELECTRON-MICROSCOPY OF SILICON GRAIN-BOUNDARIES
MAURICE, JL
JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1988, 13 (03): : A31 - A31
[4] A SCANNING ELECTRON-MICROSCOPY TRANSMISSION ELECTRON-MICROSCOPY STUDY OF THE PHOTOCRYSTALLIZATION OF AMORPHOUS-SILICON
PRASAD, A
EBIHARA, K
JOHN, PK
TONG, BY
WONG, SK
CHIK, KP
JOURNAL OF APPLIED PHYSICS, 1983, 54 (10) : 5760 - 5763
[5] DELINEATION OF SHALLOW JUNCTIONS IN SILICON BY TRANSMISSION ELECTRON-MICROSCOPY
SHENG, TT
MARCUS, RB
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (08) : C389 - C389
[6] POROUS SILICON MICROSTRUCTURE AS STUDIED BY TRANSMISSION ELECTRON-MICROSCOPY
CHUANG, SF
COLLINS, SD
SMITH, RL
APPLIED PHYSICS LETTERS, 1989, 55 (15) : 1540 - 1542
[7] TRANSMISSION ELECTRON-MICROSCOPY OF INSITU DEPOSITED FILMS ON SILICON
GIBSON, JM
BATSTONE, JL
LANZEROTTI, MY
EVALUATION OF ADVANCED SEMICONDUCTOR MATERIALS BY ELECTRON MICROSCOPY, 1989, 203 : 295 - 304
[8] TRANSMISSION ELECTRON-MICROSCOPY OF NANOMACHINED SILICON-CRYSTALS
PUTTICK, KE
WHITMORE, LC
CHAO, CL
GEE, AE
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1994, 69 (01): : 91 - 103
[9] TRANSMISSION ELECTRON-MICROSCOPY OF SILICON-SILICIDE INTERFACES
FOLL, H
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (03) : C103 - C103
[10] DELINEATION OF SHALLOW JUNCTIONS IN SILICON BY TRANSMISSION ELECTRON-MICROSCOPY
SHENG, TT
MARCUS, RB
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (04) : 881 - 884

← 1 2 3 4 5 →