THE REMOVAL OF HYDROCARBONS AND SILICONE GREASE STAINS FROM SILICON-WAFERS

被引：25
|
作者：
SHERMAN, R
WHITLOCK, W
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 03期
关键词：
D O I：
10.1116/1.585010
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：563 / 567
页数：5
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