THE REMOVAL OF HYDROCARBONS AND SILICONE GREASE STAINS FROM SILICON-WAFERS

被引：25

作者：

SHERMAN, R

WHITLOCK, W

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 03期

关键词：

D O I：

10.1116/1.585010

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：563 / 567

页数：5

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