EQUILIBRIUM OF CARBON AND OXYGEN IN SILICON WITH CARBON-MONOXIDE IN AMBIENT ATMOSPHERE

被引：17

作者：

ENDO, Y ^{[1
]}

YATSURUGI, Y ^{[1
]}

TERAI, Y ^{[1
]}

NOZAKI, T ^{[1
]}

机构：

[1] INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPAN

来源：

关键词：

D O I：

10.1149/1.2129292

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1422 / 1425

页数：4

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[41] CARBON-MONOXIDE
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