EQUILIBRIUM OF CARBON AND OXYGEN IN SILICON WITH CARBON-MONOXIDE IN AMBIENT ATMOSPHERE

被引：17
|
作者：
ENDO, Y [1 ]
YATSURUGI, Y [1 ]
TERAI, Y [1 ]
NOZAKI, T [1 ]
机构：
[1] INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPAN
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1979年 / 126卷 / 08期
关键词：
D O I：
10.1149/1.2129292
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1422 / 1425
页数：4
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