DEPTH PROFILE MEASUREMENTS OF COPPER IN SILICON BY ION-INDUCED X-RAY-EMISSION

被引：2
|
作者：
BERNHARD, F
KERKOW, H
KUDELLA, F
机构：
来源：
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1980年 / 49卷 / 1-3期
关键词：
D O I：
10.1080/00337578008243076
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
引用
收藏
页码：107 / 111
页数：5
相关论文
共 50 条
  • [1] ION-INDUCED CHARACTERISTIC X-RAY-EMISSION IN SOLIDS
    KABACHNIK, NM
    KERKOW, H
    PETUKHOV, VP
    ROMANOVSKII, EA
    WEDELL, R
    PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1987, 139 (01): : 17 - 57
  • [2] APPLICATIONS OF SIMULTANEOUS ION BACKSCATTERING AND ION-INDUCED X-RAY-EMISSION
    MUSKET, RG
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3): : 420 - 424
  • [3] APPLICATION OF ION-INDUCED X-RAY-EMISSION FOR MEASUREMENT OF STOPPING POWERS
    KLIWER, JK
    ELFIQI, AR
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (08): : 1061 - 1061
  • [4] INFLUENCE OF TOPOGRAPHY OF A SAMPLE IN ION-INDUCED X-RAY-EMISSION ANALYSIS
    SCHIEKEL, M
    ISOTOPENPRAXIS, 1977, 13 (04): : 133 - 135
  • [5] MEASUREMENT OF STOPPING POWERS USING ION-INDUCED X-RAY-EMISSION
    MARSHALL, RE
    FIQI, ARE
    KLIWER, JK
    NUCLEAR INSTRUMENTS & METHODS, 1978, 150 (02): : 241 - 245
  • [6] ION-INDUCED M X-RAY-EMISSION FROM HEAVY LANTHANIDES
    ARAI, H
    ISHII, K
    SERA, K
    ORIHARA, H
    MORITA, S
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1987, 262 (01): : 144 - 149
  • [7] APPLICATION OF ION-INDUCED X-RAY-EMISSION FOR THE MEASUREMENT OF STOPPING POWERS
    KLIWER, J
    ELFIQI, A
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1979, 26 (01) : 1323 - 1325
  • [8] ION-INDUCED X-RAY-EMISSION - PARAMETER SET FOR ATTENUATION CORRECTIONS
    BRUNNER, G
    ISOTOPENPRAXIS, 1986, 22 (01): : 12 - 16
  • [9] ION-INDUCED X-RAY-EMISSION AND ELECTRON-MICROSCOPY FOR THE INVESTIGATION OF MICROPARTICLES
    ROMOKROGER, CM
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 85 (1-4): : 845 - 848
  • [10] DEPTH PROFILE DETERMINATION BY ION-INDUCED X-RAY SPECTROSCOPY
    PABST, W
    NUCLEAR INSTRUMENTS & METHODS, 1974, 120 (03): : 543 - 545
12345