DISTRIBUTION OF GOLD AND OXYGEN IN SOLID-PHASE EPITAXY SI FILMS

被引：9
|
作者：
CHRISTOU, A [1 ]
DAVEY, JE [1 ]
DAY, HM [1 ]
DIETRICH, HB [1 ]
机构：
[1] USN,RES LAB,WASHINGTON,DC 20375
来源：
APPLIED PHYSICS LETTERS | 1977年 / 30卷 / 11期
关键词：
D O I：
10.1063/1.89251
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：598 / 600
页数：3
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