Fabrication of Transparent and Conductive Al-doped ZnO Films for Solar Cells

被引：4
|
作者：
Tark, Sung Ju [1 ]
Rang, Min gu [1 ]
Kim, Donghwan [1 ]
机构：
[1] Korea Univ, Dept Mat Sci & Engn, Seoul 136701, South Korea
来源：
KOREAN JOURNAL OF MATERIALS RESEARCH | 2006年 / 16卷 / 07期
关键词：
Al-doped ZnO; rf magnetron sputter; TCO surface textured;
D O I：
10.3740/MRSK.2006.16.7.449
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Al-doped zinc oxide (ZnO:Al) films for transparent electrodes in thin film solar cells were deposited on glass substrates at a low temperature of 200 degrees C by rf magnetron sputtering. The transmittance of the ZnO:Al films in the visible range was 87%. The lowest resistivity of the ZnO:Al films was about 5.8X10(-4)ohm-cm at the Al content of 2.5 wt%. After deposition, the surface of ZnO:Al films were etched in dilute HC1 (0.59$) for the investigation of the change in the electrical properties and the surface morphology due to etching.
引用
收藏
页码：449 / 454
页数：6
相关论文
共 50 条
  • [41] Growth and optical properties of ZnO nanorod arrays on Al-doped ZnO transparent conductive film
    Suanzhi Lin
    Hailong Hu
    Weifeng Zheng
    Yan Qu
    Fachun Lai
    Nanoscale Research Letters, 8
  • [42] Growth and optical properties of ZnO nanorod arrays on Al-doped ZnO transparent conductive film
    Lin, Suanzhi
    Hu, Hailong
    Zheng, Weifeng
    Qu, Yan
    Lai, Fachun
    NANOSCALE RESEARCH LETTERS, 2013, 8
  • [43] Characterization of conductive Al-doped ZnO thin films for plasmonic applications
    Masouleh, F. F.
    Sinno, I.
    Buckley, R. G.
    Gouws, G.
    Moore, C. P.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2018, 124 (02):
  • [44] Characterization of conductive Al-doped ZnO thin films for plasmonic applications
    F. F. Masouleh
    I. Sinno
    R. G. Buckley
    G. Gouws
    C. P. Moore
    Applied Physics A, 2018, 124
  • [45] Alignment capabilities and EO performances of VA-LCD using transparent conductive Al-doped ZnO films
    Kim, Sang-Hoon
    Hwang, Jeoung-Yeon
    Kim, Jong-Hwan
    Kim, Young-Hwan
    Kang, Dong-Hun
    Lee, Sang-Keuk
    Han, Jin-Woo
    Ok, Chul-Hol
    Seo, Dae-Shik
    Kim, Eung-Sang
    MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2007, 475 : 23 - 32
  • [46] Effect of internal stress on the electro-optical behaviour of Al-doped ZnO transparent conductive thin films
    Proost, J.
    Henry, F.
    Tuyaerts, R.
    Michotte, S.
    JOURNAL OF APPLIED PHYSICS, 2016, 120 (07)
  • [47] Light-trapping Al-doped ZnO thin films for organic solar cells
    Yu, Xuan
    Yu, Xiaoming
    Zhang, Jianjun
    Zhang, Dekun
    Chen, Liqiao
    Long, Yunqian
    SOLAR ENERGY, 2017, 153 : 96 - 103
  • [48] Optoelectronic effect of Al-based buffer layers on Al-doped ZnO thin transparent conductive films on flexible substrates
    Hao, Ming
    Lu, Xianhang
    Sun, Fei
    Fu, Yunhe
    Ba, Yaoshuai
    Xie, Yuanhua
    Liu, Kun
    OPTICAL MATERIALS, 2024, 157
  • [49] Effect of Al concentrations on the electrodeposition and properties of transparent Al-doped ZnO thin films
    O. Baka
    A. Azizi
    S. Velumani
    G. Schmerber
    A. Dinia
    Journal of Materials Science: Materials in Electronics, 2014, 25 : 1761 - 1769
  • [50] Effect of Al concentrations on the electrodeposition and properties of transparent Al-doped ZnO thin films
    Baka, O.
    Azizi, A.
    Velumani, S.
    Schmerber, G.
    Dinia, A.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2014, 25 (04) : 1761 - 1769
12345