ANISOTROPIC (211) SILICON-WAFER ETCHING FOR BLAZED GRATINGS

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作者：
SPIERINGS, GACM
VERHOEVEN, JFC
DENBIGGELAAR, H
GIJSBERS, TG
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来源：
PHILIPS JOURNAL OF RESEARCH | 1989年 / 44卷 / 04期
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T [工业技术];
学科分类号：
08 ;
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页码：407 / 415
页数：9
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