ANISOTROPIC (211) SILICON-WAFER ETCHING FOR BLAZED GRATINGS

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作者：

SPIERINGS, GACM

VERHOEVEN, JFC

DENBIGGELAAR, H

GIJSBERS, TG

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PHILIPS JOURNAL OF RESEARCH | 1989年 / 44卷 / 04期

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T [工业技术];

学科分类号：

08 ;

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页码：407 / 415

页数：9

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