PREPARATION OF CATIO3 HETEROEPITAXIAL THIN-FILMS BY EXCIMER-LASER DEPOSITION

被引：13
|
作者：
FUJII, T
FUJISHIMA, A
HIRANO, T
KOBAYASHI, T
机构：
[1] Department of Electrical Engineering, Faculty of Engineering Science, Osaka University, Toyonaka, Osaka 560, 1-1, Machikaneyama
来源：
APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 24期
关键词：
D O I：
10.1063/1.109078
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
CaTiO3 thin films were prepared by a 193 nm ArF excimer laser deposition method. Epitaxial CaTiO3 thin films were obtained on SrTiO3 (100) substrate and YBa2Cu3Oy (001) deposited on MgO (100) single-crystal substrate. The grown CaTiO3 thin films orientated to (010) direction and the unit cell of CaTiO3 rotated 45-degrees around the [100] axis of the SrTiO3 substrate. It also happened in CaTiO3/YBa2Cu3Oy/MgO system. The static dielectric constant was 120 at room temperature and reached 175 at lower temperatures.
引用
收藏
页码：3204 / 3206
页数：3
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