MINIATURIZED LIQUID-METAL FIELD ELECTRON AND ION SOURCES

被引:0
|
作者
MITTERAUER, J
机构
来源
关键词
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The emission site distribution of a slit type liquid metal ion source operating with caesium is investigated, resulting in a micron-sized linear array of emission sites with spacings rather independent of the emission current. Technological methods customary in vacuum microelectronics are suggested for the fabrication of miniaturized linear arrays of liquid metal field effect sources, operating at least at much lower voltages.
引用
收藏
页码:61 / 64
页数:4
相关论文
共 50 条
  • [21] Liquid-metal ion sources for refractory metal ion production
    Sikharulidze, GG
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1996, 39 (06) : 843 - 845
  • [22] DYNAMIC BEHAVIOR OF LIQUID-METAL FIELD-EMISSION ION SOURCES
    THOMPSON, S
    PREWETT, PD
    ULTRAMICROSCOPY, 1980, 5 (02) : 237 - 237
  • [23] CHARGE STATE OF IONS IN LIQUID-METAL FIELD-ION SOURCES
    KINGHAM, DR
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 31 (03): : 161 - 164
  • [24] Theoretical approach to liquid-metal field-emission electron sources
    Gotoh, Y
    Tsuji, H
    Ishikawa, J
    APPLIED SURFACE SCIENCE, 1999, 146 (1-4) : 377 - 381
  • [25] Theoretical approach to liquid-metal field-emission electron sources
    Dept. of Electron. Sci. and Eng., Kyoto Univ., Yoshida-honmachi, S., Kyoto, Japan
    Appl Surf Sci, 1 (377-381):
  • [26] MECHANISMS OF ION FORMATION IN LIQUID-METAL ION SOURCES
    KINGHAM, DR
    SWANSON, LW
    JOURNAL DE PHYSIQUE, 1984, 45 (NC9): : 133 - 138
  • [27] THE APPLICATION OF LIQUID-METAL ION SOURCES TO SIMS
    WAUGH, AR
    BAYLY, AR
    ANDERSON, K
    VACUUM, 1984, 34 (1-2) : 103 - 106
  • [28] Dynamical effects in liquid-metal ion sources
    Vladimirov, V.V.
    Gorshkov, V.N.
    Mozyrsky, D.V.
    Applied Surface Science, 1995, 87-88 (1-4): : 112 - 116
  • [29] EMISSION CHARACTERISTICS OF LIQUID-METAL ION SOURCES
    SWANSON, LW
    SCHWIND, GA
    BELL, AE
    ULTRAMICROSCOPY, 1980, 5 (02) : 237 - 238
  • [30] SECONDARY ELECTRONS IN LIQUID-METAL ION SOURCES
    CZARCZYNSKI, W
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (01): : 113 - 116