AC CONDUCTION OF THE HEAVILY DOPED GLOW-DISCHARGE AMORPHOUS-SILICON FILMS

被引：4
|
作者：
NITTA, S
SHIMAKAWA, K
NONOMURA, S
机构：
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1980年 / 35-6卷 / JAN-期
关键词：
D O I：
10.1016/0022-3093(80)90617-1
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：339 / 344
页数：6
相关论文
共 50 条
  • [21] RAMAN-STUDY ON THE SILICON NETWORK OF HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED BY A GLOW-DISCHARGE
    HISHIKAWA, Y
    WATANABE, K
    TSUDA, S
    OHNISHI, M
    KUWANO, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (04): : 385 - 389
  • [22] PLASMA SPECTROSCOPY GLOW-DISCHARGE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON
    MATSUDA, A
    TANAKA, K
    THIN SOLID FILMS, 1982, 92 (1-2) : 171 - 187
  • [23] THE EFFECT OF FILM THICKNESS ON THE REFLECTIVITY OF GLOW-DISCHARGE AMORPHOUS-SILICON
    DONNADIEU, A
    WEISER, G
    BEICHLER, J
    SOLAR ENERGY MATERIALS, 1981, 4 (04): : 455 - 459
  • [24] A MODEL OF AMORPHOUS-SILICON DEPOSITION IN DC GLOW-DISCHARGE IN SILANE
    YAMAGUCHI, Y
    SUMIYAMA, A
    HATTORI, R
    MOROKUMA, Y
    MAKABE, T
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1989, 22 (04) : 505 - 511
  • [25] EFFECT OF TEMPERATURE ON OPTICAL-PROPERTIES OF GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON FILMS
    DONNADIEU, A
    YOUS, B
    BERGER, JM
    FERRATON, JP
    ROBIN, J
    JOURNAL DE PHYSIQUE, 1981, 42 (NC4): : 655 - 658
  • [26] FREQUENCY-DEPENDENT LOSS IN GLOW-DISCHARGE AMORPHOUS-SILICON
    SHIMAKAWA, K
    LONG, AR
    ANDERSON, MJ
    IMAGAWA, O
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 : 623 - 626
  • [27] DEPOSITION TECHNIQUE FOR AMORPHOUS-SILICON - GLOW-DISCHARGE DECOMPOSITION OF SILANE
    MATSUDA, A
    DENKI KAGAKU, 1984, 52 (07): : 398 - 402
  • [28] FREQUENCY-DEPENDENT TRANSPORT IN GLOW-DISCHARGE AMORPHOUS-SILICON
    SHIMAKAWA, K
    WATANABE, A
    HATTORI, K
    IMAGAWA, O
    PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1986, 54 (05): : 391 - 414
  • [29] DOPANT CONCENTRATION MEASUREMENTS IN HYDROGENATED AMORPHOUS-SILICON FILMS BY GLOW-DISCHARGE OPTICAL SPECTROSCOPY
    ZESCH, JC
    LUJAN, RA
    DELINE, VR
    SOLAR CELLS, 1980, 2 (04): : 377 - 383
  • [30] DENSITY OF STATES IN AMORPHOUS-SILICON PRODUCED BY MICROWAVE GLOW-DISCHARGE
    AKTIK, M
    CURRIE, JF
    YELON, A
    JOURNAL OF APPLIED PHYSICS, 1982, 53 (01) : 439 - 441
12345