DOPANT CONCENTRATION MEASUREMENTS IN HYDROGENATED AMORPHOUS-SILICON FILMS BY GLOW-DISCHARGE OPTICAL SPECTROSCOPY

被引：1

作者：

ZESCH, JC ^{[1
]}

LUJAN, RA ^{[1
]}

DELINE, VR ^{[1
]}

机构：

[1] CHARLES EVANS & ASSOCIATES,SAN MATEO,CA 94402

来源：

SOLAR CELLS | 1980年 / 2卷 / 04期

关键词：

D O I：

10.1016/0379-6787(80)90013-7

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：377 / 383

页数：7

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