SPUTTERING OBSERVATIONS DURING BINARY ALLOY PRODUCTION BY ION-IMPLANTATION

被引：24

作者：

REYNOLDS, GW

KNUDSON, AR

GOSSETT, CR

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1981年 / 182卷 / APR期

关键词：

Compendex;

D O I：

10.1016/0029-554X(81)90686-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

METALS AND ALLOYS

引用

页码：179 / 185

页数：7

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