ION-IMPLANTATION ASSOCIATED DEFECT PRODUCTION IN SILICON

被引：79
|
作者：
TROXELL, JR
机构：
来源：
SOLID-STATE ELECTRONICS | 1983年 / 26卷 / 06期
关键词：
D O I：
10.1016/0038-1101(83)90169-7
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：539 / 548
页数：10
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