HIGHLY INSULATING SILICON-NITRIDE FILMS

被引：1
|
作者：
NAZAR, FM
机构：
来源：
INTERNATIONAL JOURNAL OF ELECTRONICS | 1979年 / 46卷 / 01期
关键词：
D O I：
10.1080/00207217908900965
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：57 / 64
页数：8
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