HIGHLY INSULATING SILICON-NITRIDE FILMS

被引：1

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作者：

NAZAR, FM

机构：

来源：

INTERNATIONAL JOURNAL OF ELECTRONICS | 1979年 / 46卷 / 01期

关键词：

D O I：

10.1080/00207217908900965

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：57 / 64

页数：8

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