TEMPORAL AND SPECTRAL CHARACTERISTICS OF THE OUTPUT OF AN EXCIMER LASER

被引：4
|
作者：
JOHNSON, ME [1 ]
VOIGTMAN, E [1 ]
机构：
[1] UNIV MASSACHUSETTS,DEPT CHEM,LGRT-A 102,AMHERST,MA 01003
来源：
APPLIED SPECTROSCOPY | 1990年 / 44卷 / 06期
关键词：
D O I：
10.1366/0003702904086713
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The output of a Questek Model 2210 excimer laser, operated with XeCl fill, is characterized in both the time and frequency domains. Power spectra are obtained through use of the fast Fourier transform which show that the output is essentially white in character. Furthermore, noise power diminishes with repetition rate, reaching a broad minimum around 40 Hz. Analysis in the time domain shows a 'roughly Gaussian' distribution. Movement of optically opaque ('thick') particles in the path of the laser beam is shown to increase the variance of the noise, but not its low-frequency content.
引用
收藏
页码：958 / 961
页数：4
相关论文
共 50 条
  • [41] Spectral brightness and other improvements to the tunable ArF excimer laser
    NASA Langley Research Cent, Hampton, United States
    Rev Sci Instrum, 7 (2591-2594):
  • [42] Spectral brightness and other improvements to the tunable ArF excimer laser
    Balla, RJ
    Hart, RC
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (07): : 2591 - 2594
  • [43] SPECTRAL-NARROWING TECHNIQUES FOR EXCIMER LASER-OSCILLATORS
    MCKEE, TJ
    CANADIAN JOURNAL OF PHYSICS, 1985, 63 (02) : 214 - 219
  • [44] Excimer laser model based on a temporal convolutional neural network
    Sun, Zexu
    Han, Xiaoquan
    Wu, Xiaobin
    Feng, Zebin
    APPLIED OPTICS, 2022, 61 (02) : 362 - 368
  • [45] Energy and spectral–temporal characteristics of a Fe:ZnSe laser on heavily doped single crystals
    V. A. Antonov
    K. N. Firsov
    E. M. Gavrishchuk
    I. G. Kononov
    S. V. Kurashkin
    S. V. Podlesnykh
    N. A. Raspopov
    A. A. Sirotkin
    N. V. Zhavoronkov
    Applied Physics B, 2020, 126
  • [46] Spectral and temporal characteristics of target current and electromagnetic pulse induced by nanosecond laser ablation
    Krasa, J.
    De Marco, M.
    Cikhardt, J.
    Pfeifer, M.
    Velyhan, A.
    Klir, D.
    Rezac, K.
    Limpouch, J.
    Krousky, E.
    Dostal, J.
    Ullschmied, J.
    Dudzak, R.
    PLASMA PHYSICS AND CONTROLLED FUSION, 2017, 59 (06)
  • [47] Spectral and Temporal Characteristics of Photoluminescence in Alpha Alumina Crystals under UV Laser Excitation
    V. S. Gorelik
    I. A. Rakhmatullaev
    Inorganic Materials, 2004, 40 : 623 - 625
  • [48] Output characteristic of electron-beam pumping XeCl excimer laser
    Huang C.
    Yi A.
    Qian H.
    An X.
    Li G.
    Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2019, 48 (10):
  • [49] Output stabilization technology with chemical impurity control on ArF excimer laser
    Sumitani, A
    Andou, S
    Watanabe, T
    Konishi, M
    Egawa, S
    Uchino, I
    Ohta, T
    Terashima, K
    Suzuki, N
    Enami, T
    Mizoguchi, H
    OPTICAL MICROLITHOGRAPHY XIII, PTS 1 AND 2, 2000, 4000 : 1424 - 1434
  • [50] Temporal and Spectral Characteristics of the Radiation Generated by an Electron Driven by a Relativistically Intense Laser Field
    Galkin, A. L.
    Kalashnikov, M. P.
    Korobkin, V. V.
    Romanovsky, M. Yu.
    Shiryaev, O. B.
    Trofimov, V. A.
    CONTRIBUTIONS TO PLASMA PHYSICS, 2011, 51 (05) : 482 - 490
12345