TEMPORAL AND SPECTRAL CHARACTERISTICS OF THE OUTPUT OF AN EXCIMER LASER

被引：4
|
作者：
JOHNSON, ME [1 ]
VOIGTMAN, E [1 ]
机构：
[1] UNIV MASSACHUSETTS,DEPT CHEM,LGRT-A 102,AMHERST,MA 01003
来源：
APPLIED SPECTROSCOPY | 1990年 / 44卷 / 06期
关键词：
D O I：
10.1366/0003702904086713
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The output of a Questek Model 2210 excimer laser, operated with XeCl fill, is characterized in both the time and frequency domains. Power spectra are obtained through use of the fast Fourier transform which show that the output is essentially white in character. Furthermore, noise power diminishes with repetition rate, reaching a broad minimum around 40 Hz. Analysis in the time domain shows a 'roughly Gaussian' distribution. Movement of optically opaque ('thick') particles in the path of the laser beam is shown to increase the variance of the noise, but not its low-frequency content.
引用
收藏
页码：958 / 961
页数：4
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