ULTRA-PRECISE MASK METROLOGY - DEVELOPMENT AND PRACTICAL RESULTS OF A NEW MEASURING MACHINE

被引：0
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作者：
FEINDT, H
SOFRONIJEVIC, D
机构：
来源：
OPTICAL MICROLITHOGRAPHY AND METROLOGY FOR MICROCIRCUIT FABRICATION | 1989年 / 1138卷
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：151 / 157
页数：7
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