GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR MONITORING SPUTTER DEPOSITED FILM THICKNESS

被引：42
|
作者：
GREENE, JE
SEQUEDAO.F
机构：
[1] UNIV ILLINOIS, DEPT MECH & IND ENGN, URBANA, IL 61801 USA
[2] UNIV ILLINOIS, DEPT MIN & MET, COORDINATED SCI LAB, URBANA, IL 61801 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 06期
关键词：
D O I：
10.1116/1.1318510
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1144 / 1149
页数：6
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