Broadband transitions for membrane-based coplanar waveguides on highly-conductive silicon substrates

被引：0
|
作者：
Rohland, M. [1 ,2 ]
Arz, U. [1 ]
Kuhlmann, K. [1 ]
Buettgenbach, S. [2 ]
机构：
[1] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany
[2] Inst Mikrotech, D-38106 Braunschweig, Germany
来源：
ADVANCES IN RADIO SCIENCE | 2012年 / 10卷 / 10期
关键词：
D O I：
10.5194/ars-10-13-2012
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present a transition from a contact structure built on highly-conductive silicon to a coplanar waveguide (CPW) fabricated in membrane technology. Test structures were fabricated and measured. The silicon-to-membrane transition is suitable for on-wafer probing and provides less than -10 dB measured reflection in the frequency range from 1 to 110 GHz. Measured and calculated values of the propagation constant of the membrane CPW agree well in the entire frequency range.
引用
收藏
页码：13 / 18
页数：6
相关论文
共 50 条
  • [31] Numerical simulation of the heat transfer in amorphous silicon nitride membrane-based microcalorimeters
    Revaz, B
    Zink, BL
    O'Neil, D
    Hull, L
    Hellman, F
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2003, 74 (10): : 4389 - 4403
  • [32] Highly Efficient Broadband Adiabatic Mode Transformation Between Single-Mode Fibers and Silicon Waveguides
    Son, Gyeongho
    Pradono, Rizki Arif
    You, Jong-Bum
    Jeong, Youngjae
    Kwon, Kyungmok
    Park, Jongwoo
    Han, Seungjun
    Han, Dae Seok
    Jung, Youngho
    Yu, Kyoungsik
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2023, 41 (21) : 6764 - 6772
  • [33] Superwetting membrane-based strategy for highly efficient separation of dimethyl carbonate and methanol
    Li, Hui
    Huang, Yan
    Dou, Wenguang
    Ma, Hongli
    Liu, Chan
    Zhao, Xuanting
    Chen, Xingchao
    Zhang, Yuqiang
    Zhao, Yuchao
    Liu, Hongliang
    Diao, Shen
    SEPARATION AND PURIFICATION TECHNOLOGY, 2024, 341
  • [34] Ungrounded Coplanar Waveguide Based Straight Line Methods for Broadband and Continuous Dielectric Characterization of Microwave Substrates
    Cai, Longzhu
    Jiang, Zhi Hao
    Huang, Yan
    Hong, Wei
    IEEE ACCESS, 2020, 8 : 32624 - 32631
  • [35] Design of a broadband polarization rotator for silicon-based cross-slot waveguides
    Wang, Jiayuan
    Xiao, Jinbiao
    Sun, Xiaohan
    APPLIED OPTICS, 2015, 54 (12) : 3805 - 3810
  • [36] Highly-Conductive and Durable SOFC Cathode-Side Contact Based on Reactively-Sintered Mn-Co Spinel
    Hayes, J. R.
    Zhu, J. H.
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2023, 170 (12)
  • [37] Antibacterial triboelectric membrane-based highly-efficient self-charging supercapacitors
    Zhao, Kun
    Qin, Qingqing
    Wang, Haifeng
    Yang, Ya
    Yan, Jian
    Jiang, Xingmao
    NANO ENERGY, 2017, 36 : 30 - 37
  • [38] A Conformal Mapping-Based Broadband Method to Extract Propagation Properties of Dielectrics Using Coplanar Waveguides With Air Pockets
    Yu, Seng Loong
    Rojas-Nastrucci, Eduardo A.
    IEEE JOURNAL OF MICROWAVES, 2023, 3 (02): : 687 - 697
  • [39] InP membrane-based microlasers on silicon wafer: Microdisks vs photonic crystal cavities
    Monat, C
    Seassal, C
    Rojo-Romeo, P
    Letartre, X
    Regreny, P
    Gendry, M
    Viktorovitch, P
    Hollinger, G
    Jalaguier, E
    Pocas, S
    Aspar, B
    2001 INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS, CONFERENCE PROCEEDINGS, 2001, : 603 - 606
  • [40] Power Enhancement of Silicon Membrane-based Thermoelectric Energy Harvester with Tailored Holey Nanostructures
    Yanagisawa, R.
    Nomura, M.
    18TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS, 2019, 1407
12345