DIFFUSION INDUCED RECRYSTALLIZATION DURING ION-BEAM MILLING

被引：3
|
作者：
GIANNUZZI, LA
HOWELL, PR
PICKERING, HW
BITLER, WR
机构：
[1] Department of Materials Science, Engineering The Pennsylvania State University University Park
来源：
SCRIPTA METALLURGICA ET MATERIALIA | 1990年 / 24卷 / 12期
关键词：
D O I：
10.1016/0956-716X(90)90102-M
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：2407 / 2412
页数：6
相关论文
共 50 条
  • [1] NITROGEN ION-BEAM INDUCED RECRYSTALLIZATION OF ALNX FILMS
    KOBAYASHI, K
    NAMBA, S
    FUJIHANA, T
    DAI, Y
    IWAKI, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4): : 689 - 692
  • [2] MODELING ION-BEAM MILLING
    YOUNGNER, DW
    HAYNES, CM
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02): : 677 - 680
  • [3] FOCUSED ION-BEAM MILLING
    WATKINS, REJ
    ROCKETT, P
    THOMS, S
    CLAMPITT, R
    SYMS, R
    VACUUM, 1986, 36 (11-12) : 961 - 967
  • [4] ION-BEAM ETCHING (MILLING).
    Lee, R.E.
    VLSI Electronics, Microstructure Science, 1984, 8 : 341 - 364
  • [5] ADVANCES IN ION-BEAM MILLING
    ROBERTSON, DD
    SOLID STATE TECHNOLOGY, 1978, 21 (12) : 57 - 60
  • [6] Ion-beam induced amorphization and dynamic epitaxial recrystallization in α-quartz
    Dhar, S
    Bolse, W
    Lieb, KP
    JOURNAL OF APPLIED PHYSICS, 1999, 85 (06) : 3120 - 3123
  • [7] FOCUSED ION-BEAM INDUCED DEPOSITION AND ION MILLING AS A FUNCTION OF ANGLE OF ION INCIDENCE
    XU, X
    DELLARATTA, AD
    SOSONKINA, J
    MELNGAILIS, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2675 - 2680
  • [8] INFLUENCE OF ION ENERGY AND OBJECT TEMPERATURE DURING ION-BEAM MILLING OF GAAS
    SPYCHER, R
    SCHMID, F
    BUFFAT, PA
    HELVETICA PHYSICA ACTA, 1988, 61 (06): : 853 - 856
  • [9] Swift heavy ion-beam induced amorphization and recrystallization of yttrium iron garnet
    Costantini, Jean-Marc
    Miro, Sandrine
    Beuneu, Francois
    Toulemonde, Marcel
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2015, 27 (49)
  • [10] AR ION-BEAM INDUCED RECRYSTALLIZATION OF AMORPHOUS LAYERS IN THIN SI FILMS
    HART, RR
    VIJAY, RP
    RUBIO, JD
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 427 - 430
12345