SURFACE-RELIEF GRATING STRUCTURES FOR EFFICIENT HIGH BANDWIDTH INTEGRATED PHOTODETECTORS FOR OPTICAL INTERCONNECTIONS IN SILICON VLSI

被引：3
|
作者：
CLYMER, BD
机构：
来源：
APPLIED OPTICS | 1989年 / 28卷 / 24期
关键词：
D O I：
10.1364/AO.28.005374
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：5374 / 5382
页数：9
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