MICROMACHINING OF OPTICAL STRUCTURES WITH FOCUSED ION-BEAMS

被引：27
|
作者：
HARRIOTT, LR
SCOTTI, RE
CUMMINGS, KD
AMBROSE, AF
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期
关键词：
D O I：
10.1116/1.583865
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：207 / 210
页数：4
相关论文
共 50 条
  • [21] ELECTRON AND ION-BEAMS BY FOCUSED DISCHARGES
    BOSTICK, WH
    FEUGEAS, J
    NARDI, V
    PRIOR, W
    KILIC, H
    POWELL, C
    BORTOLOTTI, A
    BUTTINO, G
    CORTESE, C
    FERROMILONE, A
    MEZZETTI, F
    PEDRIELLI, F
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1980, 25 (08): : 871 - 871
  • [22] USE OF FOCUSED ION-BEAMS FOR ANALYSIS
    COOKSON, JA
    PILLING, FD
    THIN SOLID FILMS, 1973, 19 (02) : 381 - 385
  • [23] INSITU PROCESSING OF ALGAAS/GAAS STRUCTURES USING MBE AND FOCUSED ION-BEAMS
    FISCHER, R
    WEINER, JS
    CHO, AY
    JOURNAL OF ELECTRONIC MATERIALS, 1988, 17 (04) : S13 - S13
  • [24] APPLICATIONS OF FOCUSED ION-BEAMS TO NONDESTRUCTIVE ANALYSES
    TAKAI, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 96 (1-2): : 179 - 186
  • [25] HIGH-RESOLUTION FOCUSED ION-BEAMS
    ORLOFF, J
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (05): : 1105 - 1130
  • [26] NEW TECHNIQUES FOR MODELING FOCUSED ION-BEAMS
    NARUM, DH
    PEASE, RFW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 154 - 158
  • [27] MASKLESS FABRICATION USING FOCUSED ION-BEAMS
    GAMO, K
    NAMBA, S
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 393 : 159 - 166
  • [28] DEVELOPMENTS AND TRENDS IN THE TECHNOLOGY OF FOCUSED ION-BEAMS
    MACKENZIE, RAD
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (05): : 2561 - 2565
  • [29] SI MOSFET FABRICATION USING FOCUSED ION-BEAMS
    KUBENA, RL
    LEE, JY
    JULLENS, RA
    BRAULT, RG
    MIDDLETON, PL
    STEVENS, EH
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1984, 471 : 32 - 37
  • [30] IMAGING WITH HIGH-VELOCITY FOCUSED ION-BEAMS
    LEGGE, GJF
    SAINT, A
    CHOLEWA, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 104 (1-4): : 204 - 211
12345