MONITORING FILM THICKNESS IN COURCE OF DEPOSITION

被引：0
|
作者：
LOGVINENKO, AG
BLYUMKIN.YA
机构：
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES-USSR | 1969年 / 05期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1238 / +
页数：1
相关论文
共 50 条
  • [41] Simulation and Optimization of Film Thickness Uniformity in Physical Vapor Deposition
    Wang, Ben
    Fu, Xiuhua
    Song, Shigeng
    Chu, Hin On
    Gibson, Desmond
    Li, Cheng
    Shi, Yongjing
    Wu, Zhentao
    COATINGS, 2018, 8 (09):
  • [42] DEPOSITION OF UNEQUAL-THICKNESS COATINGS USING OPTICAL MONITORING
    PANTELEEV, GV
    ZHURAVLEV, AA
    SOVIET JOURNAL OF OPTICAL TECHNOLOGY, 1988, 55 (03): : 170 - 171
  • [43] AUTOMATIC CONTROL AND MONITORING SYSTEM FOR THIN FILM DEPOSITION
    BATH, HHA
    ENGLISH, J
    STECKELMACHER, W
    SEMICONDUCTOR PRODUCTS AND SOLID STATE TECHNOLOGY, 1967, 10 (01): : 27 - +
  • [44] Monitoring the deposition of an interference film by differential reflection of light
    P. V. Adamson
    Technical Physics Letters, 1998, 24 : 822 - 825
  • [45] Monitoring the deposition of an interference film by differential reflection of light
    Adamson, PV
    TECHNICAL PHYSICS LETTERS, 1998, 24 (10) : 822 - 825
  • [46] AUTOMATIC CONTROL AND MONITORING SYSTEM FOR THIN FILM DEPOSITION
    BATH, HHA
    ENGLISH, J
    STECKELMACHER, W
    SEMICONDUCTOR PRODUCTS AND SOLID STATE TECHNOLOGY, 1967, 10 (02): : 25 - +
  • [47] Guided wave monitoring of thickness variation for thin film materials
    Cho, Y
    MATERIALS EVALUATION, 2003, 61 (03) : 418 - 422
  • [48] FEASIBILITY OF THIN-FILM THICKNESS MONITORING BY HOLOGRAPHIC INTERFEROMETRY
    BALASUBRAMANIAN, N
    ANDERSON, RM
    STEVENSON, WH
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (03): : 1080 - +
  • [49] A PHOTOMETER FOR MONITORING FILM THICKNESS BY THE 2-WAVELENGTH METHOD
    FURMAN, SA
    ELGART, ZE
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1984, 27 (05) : 1272 - 1275
  • [50] Quartz Resonators for Monitoring Thin-Film Mass and Thickness
    L. K. Gribova
    V. E. Savchenko
    A. V. Sorokin
    Measurement Techniques, 2005, 48 : 146 - 150
12345