GLOW-DISCHARGE CLEANING OF VACUUM SWITCH TUBES

被引:2
|
作者
HAYASHI, T
TOYA, H
机构
[1] Central Research Laboratory, Mitsubishi Electric Corporation, Amagasaki, Hyogo, 661, 1–1
关键词
D O I
10.1109/27.108407
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Glow discharge cleaning has been advancing as a means of degassing vacuum chambers constructed for a large accelerator or for nuclear fusion research. To clean the whole surface of parts inside a vacuum switch tube (VST), a new technique is tried which generates glow discharge between the inner electrodes and copper grid surrounding it. Photographic observation reveals that the glow discharge spreads out and cleans the whole surface inside the VST. A breakdown test between the inner electrodes shows the effect of the cleaning with this technique. Higher breakdown voltage between the inner electrodes is attained by performing this glow discharge cleaning in argon rather than hydrogen gas. The difference of the cleaning effect seems to be attributed to that of the energy transfer from ion species to the adsorbed molecules and microprotrusions on the surfaces.
引用
收藏
页码:740 / 742
页数:3
相关论文
共 50 条