CAN EPILAYER TILT RELIEVE MISFIT STRAIN IN LATTICE-MISMATCHED HETEROSTRUCTURES

被引：16
|
作者：
RIESZ, F
机构：
[1] Research Institute for Technical Physics of the Hungarian Academy of Sciences. P.O. Box 76
来源：
VACUUM | 1995年 / 46卷 / 8-10期
关键词：
D O I：
10.1016/0042-207X(95)00097-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Small tilting of the epilayer lattice planes is commonly observed in lattice-mismatched epilayers grown on vicinal substrates. This tilt is commonly believed to be an alternative strain-relieving mechanism to the formation of misfit dislocations. It is shown that this is not likely for (100) heterosystems, because the introduction of those dislocations is favorable which relax misfit rather than those which induce tilt. The model shows good agreement with experimental observations.
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页码：1021 / 1023
页数：3
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