共 50 条
- [36] Precise proximity correction for fabricating chirped diffraction gratings with the direct-writing electron-beam lithography LITHOGRAPHIC AND MICROMACHINING TECHNIQUES FOR OPTICAL COMPONENT FABRICATION, 2001, 4440 : 268 - 276
- [38] PLATINUM BOTTOM ELECTRODES FORMED BY ELECTRON-BEAM EVAPORATION FOR HIGH THIN-FILMS JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (9B): : 5220 - 5223