ION-INDUCED MIGRATION OF CU INTO SI

被引：35
|
作者：
HART, RR [1 ]
DUNLAP, HL [1 ]
MARSH, OJ [1 ]
机构：
[1] HUGHES RES LABS,3011 MALIBU CANYON RD,MALIBU,CA 90265
来源：
JOURNAL OF APPLIED PHYSICS | 1975年 / 46卷 / 05期
关键词：
D O I：
10.1063/1.321871
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1947 / 1951
页数：5
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