PROPERTIES OF ION-PLATED NB2O5 FILMS

被引：13
|
作者：
EDLINGER, J
RAMM, J
PULKER, HK
机构：
[1] Balzers AG Zentrallabor, Liechtenstein
来源：
THIN SOLID FILMS | 1989年 / 175卷 / 1 -2 pt 2期
关键词：
Chemical Analysis - Films--Mechanical Properties;
D O I：
10.1016/0040-6090(89)90829-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Single films of Nb2O5 have been deposited on various substrates by reactive low voltage ion plating in a Balzers BAP 800 ion plating system. Chemical composition, structure, and optical and mechanical properties have been investigated. Nb2O5 offers promise as a high index optical film material in the wavelength range from 380 nm to 9 μm.
引用
收藏
页码：207 / 212
页数：6
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