SURFACE-CHEMISTRY AND SI CVD FROM SILANE

被引：0

作者：

GREENLIEF, CM ^{[1
]}

机构：

[1] UNIV MISSOURI,DEPT CHEM,COLUMBIA,MO 65211

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1990年 / 199卷

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：101 / COLL

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