SURFACE-CHEMISTRY AND SI CVD FROM SILANE

被引：0
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作者：
GREENLIEF, CM [1 ]
机构：
[1] UNIV MISSOURI,DEPT CHEM,COLUMBIA,MO 65211
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1990年 / 199卷
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：101 / COLL
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