TECHNIQUE FOR MEASURING IMPURITY CONCENTRATION OF SILICON-ON-SAPPHIRE FILMS USING C-V PLOTS

被引：1
|
作者：
WORLEY, ER [1 ]
机构：
[1] ROCKWELL INT,COLLINS RADIO GRP,NEWPORT BEACH,CA 92663
来源：
SOLID-STATE ELECTRONICS | 1976年 / 19卷 / 12期
关键词：
D O I：
10.1016/0038-1101(76)90179-9
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：997 / 1003
页数：7
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