ENERGY-LOSS DISTRIBUTION OF 100-KEV H+ IN THIN CARBON-FILMS

被引:3
|
作者
MATSUNAMI, N
KITOH, K
机构
[1] Crystalline Materials Science, School of Engineering, Nagoya University, Chukusa-ku, Nagoya, 464-01, Furo-cho
关键词
D O I
10.1016/0168-583X(92)95769-N
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The energy loss of approximately 100 keV H+ transmitted through thin carbon films of thicknesses in the range 6-20 nm has been measured with an energy resolution of approximately 20 eV. We have observed new energy loss peaks around 210 and 400 eV in addition to the normal energy loss peak around 1 keV for the thinner film of approximately 7 nm. We find that the experimental artefacts, such as the ionization of C K (290 eV) and impurity inner shells, the extreme nonuniformity of films, or the events associated with elastic scattering are not responsible for these peaks.
引用
收藏
页码:50 / 52
页数:3
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