STRUCTURE OF IONIZED CLUSTER BEAM ALUMINUM DEPOSITED ON (100) SILICON

被引：14
|
作者：
MADDEN, MC
机构：
来源：
APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 11期
关键词：
D O I：
10.1063/1.101709
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1077 / 1079
页数：3
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