PUMPING EXPERIMENT OF WATER ON B AND LAB6 FILMS WITH AN ELECTRON-BEAM EVAPORATOR

被引:5
|
作者
MORI, T
AKAISHI, K
KUBOTA, Y
MOTOJIMA, O
MUSHIAKI, M
FUNATO, Y
HANAOKA, Y
机构
[1] KAWASAKI MED SCH, DEPT PHYS, KURASHIKI, OKAYAMA 70101, JAPAN
[2] SUZUKA TECH COLL, SUZUKA 51002, JAPAN
[3] MURORAN INST TECHNOL, MURORAN, HOKKAIDO 050, JAPAN
关键词
D O I
10.1016/0022-3115(93)90314-O
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The pumping characteristic of water vapor on boron and lanthanum hexaboride films formed with an electron beam evaporator have been investigated in high vacuum between 10(-4) and 10(-3) Pa. The measured initial maximum pumping speeds of water for the fresh B or LaB6 films with a deposition amount from 2.3 x 10(21) to 6.7 x 10(21) molecules/m2 separately formed on a substrate are 3.2-4.9 m 3/SM 2, and the saturation values of adsorbed water on these films are 2.1 x 10(20)-1.3 x 10(21) H2O molecules/m2.
引用
收藏
页码:385 / 388
页数:4
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