SPUTTERING YIELDS OF METALS FOR AR+ AND NE+ IONS WITH ENERGIES FROM 50 TO 600 EV

被引：725

作者：

LAEGREID, N

WEHNER, GK

机构：

来源：

关键词：

D O I：

10.1063/1.1736012

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：365 / &

共 12 条

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[2]

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[4]

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[5] SPUTTERING YIELD OF GERMANIUM IN RARE GASES [J].

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[6]

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[7]

SCHIEFER K, 1955, DISSERTATION

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[10] LOW-ENERGY SPUTTERING YIELDS IN HG [J].

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