The dynamics of in situ superconducting YBa2Cu3O7 thin film formation was investigated. Emphasis was placed on the temporal dependence of the tetragonal to orthorhombic phase transformation. Using X-ray and in situ resistivity measurements, it was confirmed that during deposition, the tetragonal phase was formed, which was quickly transformed to the superconducting orthorhombic phase by in situ post-deposition oxygenation. The transformation takes place in a very short time by the diffusion of oxygen into the film to fill the vacant O-sites along the Cu-O chains. A one-dimensional diffusion model can fit the data quite well, yielding a diffusivity of 10(-10) cm2/s at 640-degrees-C. It was also shown that complete oxygenation took place in two steps, an isothermal structural phase transformation and an isobaric oxygen uptake.