KINOFORM ARRAY ILLUMINATORS IN FUSED-SILICA

被引：27

作者：

MILLER, JM ^{[1
]}

TAGHIZADEH, MR ^{[1
]}

TURUNEN, J ^{[1
]}

ROSS, N ^{[1
]}

NOPONEN, E ^{[1
]}

VASARA, A ^{[1
]}

机构：

[1] HELSINKI UNIV TECHNOL,DEPT TECH PHYS,SF-02150 ESPOO 15,FINLAND

来源：

JOURNAL OF MODERN OPTICS | 1993年 / 40卷 / 04期

基金：

芬兰科学院;

关键词：

D O I：

10.1080/09500349314550771

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

High-efficiency (>90%) multilevel grating array illuminators are designed using nonlinear parametric optimization and analysed using rigorous electromagnetic grating theory. Designs with eight and 16 relief depth levels are fabricated in fused silica using reactive ion etching and photolithography with three and four electron-beam generated binary amplitude masks, respectively.

引用

页码：723 / 732

页数：10

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