GROWTH AND CHARACTERIZATION OF SRS/ZNS MULTILAYERED ELECTROLUMINESCENT THIN-FILMS GROWN BY HOT-WALL TECHNIQUE

被引:3
|
作者
OHMI, K
YAMANO, Y
LEE, ST
UEDA, T
TANAKA, S
KOBAYASHI, H
机构
[1] Department of Electrical and Electronic Engineering, Tottori University, Tottori, 680, Koyama
关键词
D O I
10.1016/0022-0248(94)90956-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The growth of thin films of ZnS and SrS by the hot-wall evaporation technique has been investigated. By supplying additional sulfur (S) vapor, the deposition rate of ZnS was increased, allowing ZnS films to be grown at substrate temperatures over 400-degrees-C. SrS thin films were grown through the chemical reaction of Sr and S vapor with the substrate temperature in the region of 350-500-degrees-C. SrS/ZnS multilayered thin films were grown by the sequential deposition of the SrS and ZnS films. The (SrS/ZnS)51 multilayered thin film showed X-ray diffraction lines from both ZnS and SrS layers, even when the thickness of each SrS and ZnS layer is 20 nm. The electroluminescent devices with SrS: Ce/ZnS multilayered thin films showed a greenish blue EL emission.
引用
收藏
页码:1061 / 1065
页数:5
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