TEMPERATURE-MEASUREMENT FOR SCANNING TUNNEL MICROSCOPE SAMPLES USING A DETACHABLE THERMOCOUPLE

被引:7
|
作者
JOHN, KD
WAN, KJ
YATES, JT
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1993年 / 11卷 / 06期
关键词
D O I
10.1116/1.586448
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A detachable thermocouple contact for the measurement of sample temperature in ultrahigh vacuum was constructed and tested. The thermocouple was demonstrated to be accurate to within 1.2 K from 77 to 373 K. The thermocouple was also compared against a reference thermocouple of conventional design up to 1300 K during ohmic heating) and the agreement was within 20 K throughout this temperature range.
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收藏
页码:2137 / 2138
页数:2
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