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- [2] Flexible mask specifications 22ND ANNUAL BACUS SYMPOSIUM ON PHOTOMASK TECHNOLOGY, PTS 1 AND 2, 2002, 4889 : 187 - 196
- [3] Mask specifications and OPC 18TH ANNUAL SYMPOSIUM ON PHOTOMASK TECHNOLOGY AND MANAGEMENT, 1998, 3546 : 232 - 241
- [4] Flexible mask specifications PHOTOMASK AND NEXT-GENERATION LITHOGRAPHY MASK TECHNOLOGY IX, 2002, 4754 : 33 - 42
- [5] Enhanced flexible mask specifications PHOTOMASK AND NEXT-GENERATION LITHOGRAPHY MASK TECHNOLOGY X, 2003, 5130 : 593 - 599
- [6] FLANGES FOR ARCTIC SERVICE - ARE SPECIFICATIONS REALISTIC? Pipeline and Gas Journal, 1973, 200 (08):
- [8] Explicit expression on specifications of mask mean to target and mask uniformity JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (02): : 634 - 638
- [9] Mask specifications for 193 nm lithography 16TH ANNUAL SYMPOSIUM ON PHOTOMASK TECHNOLOGY AND MANAGEMENT, 1996, 2884 : 562 - 571
- [10] Mask specifications: It's not getting any easier MICROLITHOGRAPHY WORLD, 2008, 17 (02): : 12 - 13