AN ELECTROMECHANICAL DEVICE FOR MEASURING DEPOSITION RATES OF THIN FILMS

被引：1
|
作者：
WEISSMAN, J
HIRSCH, AA
机构：
来源：
VACUUM | 1969年 / 19卷 / 12期
关键词：
D O I：
10.1016/S0042-207X(69)91134-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：579 / &
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