AN ELECTROMECHANICAL DEVICE FOR MEASURING DEPOSITION RATES OF THIN FILMS

被引：1

|

作者：

WEISSMAN, J

HIRSCH, AA

机构：

来源：

VACUUM | 1969年 / 19卷 / 12期

关键词：

D O I：

10.1016/S0042-207X(69)91134-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：579 / &

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