THERMAL-DECOMPOSITION OF TRIETHYLGALLIUM ON VARIOUSLY RECONSTRUCTED GAAS (111)B SURFACES

被引：16

作者：

OHKI, Y ^{[1
]}

HIRATANI, Y ^{[1
]}

SASAKI, M ^{[1
]}

机构：

[1] OPTOELECTR TECHNOL RES LAB,TSUKUBA,IBARAKI 30026,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 20期

关键词：

D O I：

10.1063/1.105945

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Mass spectrometry was applied to study the thermal decomposition of triethylgallium (TEG) on a GaAs (111) B surface. Gallium-containing species desorbed or reflected from three kinds of differently reconstructed surfaces were measured at 420-degrees-C. The signal intensities of the Ga containing species changed largely with the surface reconstruction in the following order: 2 X 2 As stabilized > square-root 19 X square-root 19 Ga stabilized > 1 X 1 Ga saturated. This result indicates that larger As coverage suppresses the thermal decomposition of TEG on a GaAs (111) B surface.

引用

页码：2538 / 2540

页数：3

共 50 条

[21] BORON RECONSTRUCTED SI(111) SURFACES PRODUCED BY B2O3 DECOMPOSITION
NOGAMI, J
YOSHIKAWA, S
GLUECKSTEIN, JC
PIANETTA, P
SCANNING MICROSCOPY, 1994, 8 (04) : 835 - 840
[22] SMALL MOLECULE THERMAL-DECOMPOSITION ON MOLYBDENUM SURFACES
MILES, SL
BERNASEK, SL
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1981, 181 (MAR): : 2 - COLL
[23] STUDY OF THE THERMAL-DECOMPOSITION OF ETHYL IODIDE ON PT(111)
ZAERA, F
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1988, 196 : 253 - COLL
[24] STEP EFFECTS IN THE THERMAL-DECOMPOSITION OF METHANOL ON PT(111)
GIBSON, KD
DUBOIS, LH
SURFACE SCIENCE, 1990, 233 (1-2) : 59 - 64
[25] THERMAL-DECOMPOSITION OF HALOGENATED HYDROCARBONS ON A CU(111) SURFACE
LIN, JL
BENT, BE
ACS SYMPOSIUM SERIES, 1992, 495 : 153 - 163
[26] ISOMERIZATION, TAUTOMERIZATION, AND THERMAL-DECOMPOSITION OF AZOMETHANE ON PT(111)
JENTZ, D
PENG, XD
STAIR, P
TRENARY, M
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1994, 207 : 22 - COLL
[27] FORMATION AND THERMAL-DECOMPOSITION OF ETHYL GROUPS ON TRANSITION-METAL SURFACES - ETHYL IODIDE ON PT(111)
ZAERA, F
SURFACE SCIENCE, 1989, 219 (03) : 453 - 466
[28] Chalcogen passivation of GaAs(111)B surfaces
Suga, Takayuki
Goto, Shunji
Ohtake, Akihiro
Nakamura, Jun
2019 COMPOUND SEMICONDUCTOR WEEK (CSW), 2019,
[29] MORPHOLOGICAL-STUDY OF THERMAL-DECOMPOSITION OF INP SURFACES
CHU, SNG
JODLAUK, CM
JOHNSTON, WD
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (12) : 2398 - 2405
[30] TUNGSTEN HEXACARBONYL THERMAL-DECOMPOSITION ON NI(100) SURFACES
ZAERA, F
JOURNAL OF PHYSICAL CHEMISTRY, 1992, 96 (11): : 4609 - 4615

← 1 2 3 4 5 →