DEGRADATION OF METAL-NITRIDE-OXIDE SEMICONDUCTOR STRUCTURES UNDER THE EFFECT OF ULTRAVIOLET-IRRADIATION

被引：0
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作者：
PLOTNIKOV, AF
SELEZNEV, VN
TOKARCHUK, DN
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来源：
SOVIET MICROELECTRONICS | 1979年 / 8卷 / 06期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：413 / 416
页数：4
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